Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam

Table 8

Comparison of Pull in Voltages.

Device	Pull in Voltage; (Volts); (By Simulation)	Pull in Voltage; (Volts); (Analytical)	% Error
VSC1	173.75	155.57	10.46
VSC2	148.175	132.29	10.72
VSC3	129.985	115.88	10.85
VSC4	119.575	106.26	11.13
VSC5	47.2	42.32	10.33
VSC6	40.38	36.1	11.85
VSC7	35.48	31.69	10.68
VSC8	32.65	29.1	10.87