Table of Contents
International Journal of Plasma Science and Engineering
Volume 2008, Article ID 360964, 7 pages
http://dx.doi.org/10.1155/2008/360964
Research Article

Observation and Modeling of Optical Emission Patterns and Their Transitions in a Penning Discharge

1HY-Tech Research Corporation, Radford, VA 24141, USA
2Qimonda North America, Cary, NC 27513, USA
3Department of Nuclear Engineering, University of California, Berkeley, CA 94720, USA

Received 22 March 2007; Accepted 20 June 2007

Academic Editor: Yuri Ralchenko

Copyright © 2008 C. C. Klepper et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. K. H. Finken, K. H. Dipple, and A. Hardtke, “Measurement of helium gas in a deuterium environment,” Review of Scientific Instruments, vol. 63, no. 1, pp. 1–7, 1992. View at Publisher · View at Google Scholar
  2. D. L. Hillis, C. C. Klepper, M. Von Hellermann, J. Ehrenberg, K. H. Finken, and G. Mank, “Deuterium-tritium concentration measurements in the divertor of a tokamak via a modified Penning gauge,” Fusion Engineering and Design, vol. 34-35, pp. 347–351, 1997. View at Publisher · View at Google Scholar
  3. C. C. Klepper, D. L. Hillis, M. R. Wade, R. Maingi, and G. R. McKee, “Application of a species-selective Penning gauge to the measurement of neon and hydrogen-isotope partial pressures in the plasma boundary,” Review of Scientific Instruments, vol. 68, no. 1, pp. 400–403, 1997. View at Publisher · View at Google Scholar
  4. C. C. Klepper, R. C. Hazelton, M. D. Keitz, J. Niemel, and C. Vidoli, “Species-selective pressure gauge with extended operation,” February 2002, US patent no. 6351131. View at Google Scholar
  5. P. A. Redhead, “The magnetron gauge: a cold-cathode vacuum gauge,” Canadian Journal of Physics, vol. 37, pp. 1260–1271, 1959. View at Google Scholar
  6. M. Wutz, “Getter-ion pumps of the magnetron type and an attempted interpretation of the discharge mechanism,” Vacuum, vol. 19, no. 1, pp. 1–12, 1967. View at Publisher · View at Google Scholar
  7. J. A. Thornton, “Magnetron sputtering: basic physics and application to cylindrical magnetrons,” Journal of Vacuum Science and Technology, vol. 15, no. 2, pp. 171–177, 1978. View at Publisher · View at Google Scholar
  8. L. Gu and M. A. Lieberman, “Axial distribution of optical emission in a planar magnetron discharge,” Journal of Vacuum Science and Technology A, vol. 6, no. 5, pp. 2960–2964, 1988. View at Publisher · View at Google Scholar
  9. A. E. Wendt, M. A. Lieberman, and H. Meuth, “Radial current distribution at a planar magnetron cathode,” Journal of Vacuum Science and Technology A, vol. 6, no. 3, pp. 1827–1831, 1988. View at Publisher · View at Google Scholar
  10. S. M. Rossnagel and H. R. Kaufman, “Langmuir probe characterization of magnetron operation,” Journal of Vacuum Science and Technology A, vol. 4, no. 3, pp. 1822–1825, 1986. View at Publisher · View at Google Scholar
  11. G. Lister, “Influence of electron diffusion on the cathode sheath of a magnetron discharge,” Journal of Vacuum Science and Technology A, vol. 14, no. 5, pp. 2736–2743, 1996. View at Publisher · View at Google Scholar
  12. C. H. Shon, J. K. Lee, H. J. Lee, Y. Yang, and T. H. Chung, “Velocity distributions in magnetron sputter,” IEEE Transactions on Plasma Science, vol. 26, no. 6, pp. 1635–1644, 1998. View at Publisher · View at Google Scholar
  13. J. P. Verboncoeur, A. B. Langdon, and N. T. Gladd, “An object-oriented electromagnetic PIC code,” Computer Physics Communications, vol. 87, no. 1-2, pp. 199–211, 1995. View at Publisher · View at Google Scholar