Research Article | Open Access
Wu-Te Weng, Yao-Jen Lee, Horng-Chih Lin, Tiao-Yuan Huang, "Plasma-Induced Damage on the Reliability of Hf-Based High-
Plasma-Induced Damage on the Reliability of Hf-Based High-k /Dual Metal-Gates Complementary Metal Oxide Semiconductor Technology
Abstract
This study examines the effects of plasma-induced damage (PID) on Hf-based high-
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Copyright © 2009 Wu-Te Weng et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.