Characterization of Defects and Stress in Polycrystalline Silicon Thin Films on Glass Substrates by Raman Microscopy
Figure 18
The variation of the crystal fraction in Si film with SPC time; the heating was performed at 580°C. The volume fraction of crystal was estimated by spectroscopic ellipsometry. The intensity fraction of crystal components of the OPM in Raman spectra, , is also plotted.