International Journal of Spectroscopy / 2012 / Article / Fig 6

Research Article

Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Figure 6

Raman spectra of as-deposited a-Si:H film and crystallized by laser pulse annealing film in frequency range of valence vibration of Si–H bonds.
281851.fig.006

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