International Journal of Spectroscopy / 2012 / Article / Tab 3

Research Article

Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 3

Concentration of chemical species in SRN films according to FTIR data.

Number of samplesSi–NSi–HN–H (for eff according to Lanford) 1022 cm−3N–H (for eff according to Stein) 1022 cm−3
1022 cm−31022 cm−3

611 annealed10.56bellow 0.1bellow 0.06

We are committed to sharing findings related to COVID-19 as quickly and safely as possible. Any author submitting a COVID-19 paper should notify us at to ensure their research is fast-tracked and made available on a preprint server as soon as possible. We will be providing unlimited waivers of publication charges for accepted articles related to COVID-19. Sign up here as a reviewer to help fast-track new submissions.