International Journal of Spectroscopy / 2012 / Article / Tab 3

Research Article

Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 3

Concentration of chemical species in SRN films according to FTIR data.

Number of samplesSi–NSi–HN–H (for eff according to Lanford) 1022 cm−3N–H (for eff according to Stein) 1022 cm−3
1022 cm−31022 cm−3

61183.253
611 annealed10.56bellow 0.1bellow 0.06
6135.583.640.90.54
6153.752.920.320.19

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