Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 3

Concentration of chemical species in SRN films according to FTIR data.

Number of samples	Si–N	Si–H	N–H (for 𝑆eff according to Lanford) 10^22 cm^−3	N–H (for 𝑆eff according to Stein) 10^22 cm^−3
	10^22 cm^−3	10^22 cm^−3
611	8	3.2	5	3
611 annealed	10.5	6	bellow 0.1	bellow 0.06
613	5.58	3.64	0.9	0.54
615	3.75	2.92	0.32	0.19