Table of Contents
ISRN Mechanical Engineering
Volume 2011, Article ID 278095, 8 pages
Research Article

A Type of Two-Photon Microfabrication System and Experimentations

1Department of Opto-Eletronics, School of Instrument Science and Opto-Electronics, Beijing University of Aeronautics and Astronautics, Beijing 100083, China
2School of Automation Science and Electrical Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

Received 5 December 2010; Accepted 29 December 2010

Academic Editors: W. Dai and A. Tounsi

Copyright © 2011 Peng Wei et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


After the femtosecond laser was invented, two-photon microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon microfabrication method.