Table of Contents
ISRN Mechanical Engineering
Volume 2011 (2011), Article ID 413231, 15 pages
Review Article

Recent Developments and Research Issues in Microultrasonic Machining

Mechanical and Industrial Engineering Department, Indian Institute of Technology Roorkee, Roorkee, Uttarakhand 247667, India

Received 20 January 2011; Accepted 13 February 2011

Academic Editors: V. P. Astakhov, S. Cartmell, and K.-H. Chang

Copyright © 2011 Vivek Jain et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Demand for micromachining has been on the rise in recent years owing to increasing miniaturization. Production of parts in microscale, especially with brittle materials, is challenging. Ultrasonic micromachining has been gaining popularity as a new alternative in fabrication of such parts. The process gives a machining option for geometrically challenging and/or brittle material parts that are difficult to machine by conventional processes. In the recent years, possibilities have been explored to improve the “Unit Removal” in microultrasonic machining (micro-USM). However, the research in the area is yet to attain momentum. The present paper is an attempt to present the state of the art in the area of micro-USM based on the literature. Developments in the critical areas of the process like machine tool technology, machining tool head, transducers, and precision attainable in the process with challenges have been discussed. Potential research issues have been explored for future work. Possible application areas have been identified.