Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process

<table>Elastic recovery and <i>H/E</i> ratio of nc-Si : H films as a function of hydrogen content  (lines are drawn as a guid to the eyes).</table>

International Scholarly Research Notices

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Figure 4

Figure 4: Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 

Figure 4 | Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process 