Influence of Sound Vibration on Diamond-Like Carbon Deposition Rate

Table 1

Experimental variables.

S. number	Parameters	Range
(1)	Pressure	20–30 Torr
(2)	Substrate (nicrom) heater temperature	800–1000°C
(3)	Activation (tungsten) heater temperature	1800–2000°C
(4)	Substrate (nicrom) heater power	1000 watt
(5)	Substrate (nicrom) heater voltage	80–100 V
(6)	Substrate (nicrom) heater current	7–10 amp
(7)	Activation (tungsten) heater power	200 watt
(8)	Activation (tungsten) heater voltage	5–7 V
(9)	Activation (tungsten) heater current	25–35 amp
(10)	Flow rate (CH4 gas)	0.1–1.5 L/min
(11)	Gap between substrate and Tungsten heater	2.5–8.0 mm
(12)	Sound frequency	0–110 kHz
(13)	Deposition duration	3–10 minutes
(14)	Substrate size	22 mm × 14 mm; × 1.15 mm