Visible and Deep-Ultraviolet Raman Spectroscopy as a Tool for Investigation of Structural Changes and Redistribution of Carbon in Ni-Based Ohmic Contacts on Silicon Carbide

Table 5

Analysis of carbon band observed with irradiation by UV laser. 𝐿₁ and 𝐿₂ Lorentzian fitting components used to reproduce shape of main carbon bands, 𝐼(𝐿₂)/𝐼(𝐿₁)---𝐿₂ to 𝐿₁ intensity ratio. 𝐿₃ and 𝐿₄ Lorentzian fitting components used to reproduce narrow lines, 𝐼(𝐿₃)/𝐼(𝐿₁)---𝐿₃ to 𝐿₁ intensity ratio, 𝐼(𝐿₄)/𝐼(𝐿₁)---𝐿₄ to 𝐿₁ intensity ratio. Maxima positions and FWHMS—in cm⁻¹. Analyzed spectra were mathematically corrected for offset and normalized to 1 prior to analysis.

	𝐿1		𝐿2			𝐿3			𝐿4
Sample	Max.	FWHM	Max.	FWHM	𝐼(𝐿2)/𝐼(𝐿1)	Max.	FWHM	𝐼(𝐿3)/𝐼(𝐿1)	Max.	FWHM	𝐼(𝐿4)/𝐼(𝐿1)
	(cm^−1)	(cm^−1)	(cm^−1)	(cm^−1)		(cm^−1)	(cm^-1)		(cm^-1)	(cm^-1)
n sc1_1	1589	30	1605	21	0,09	—	—	—	1560	3	0,12
nsc1_3	1591	35	—	—	—	1538	3	0,24	1560	4	0,58