Fabrication of Self-Aligned Graphene FETs with Low Fringing Capacitance and Series Resistance

<table>Output <svg height="14.2375" id="M22" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 40.674999 14.2375" width="40.674999" xmlns="http://www.w3.org/2000/svg">
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<tspan style="font-size: 12.50px; " x="0" y="0">𝐼</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.95,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝐷</tspan>
</text>
<text transform="matrix(1,0,0,-1,-58.41,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">-</tspan>
<tspan style="font-size: 12.50px; " x="4.1634989" y="0">𝑉</tspan>
</text>
<text transform="matrix(1,0,0,-1,-47.05,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝐷</tspan>
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</svg> (a) and transfer <svg height="14.375" id="M23" style="vertical-align:-3.24037pt" version="1.1" viewbox="0 0 40.112499 14.375" width="40.112499" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.375)">
<g transform="translate(72,-60.5)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝐼</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.95,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝐷</tspan>
</text>
<text transform="matrix(1,0,0,-1,-58.41,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">-</tspan>
<tspan style="font-size: 12.50px; " x="4.1634989" y="0">𝑉</tspan>
</text>
<text transform="matrix(1,0,0,-1,-47.05,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝐺</tspan>
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</svg> characteristics (b) of graphene FET.</table>

International Scholarly Research Notices

fig7

Figure 7

Figure 7: Fabrication of Self-Aligned Graphene FETs with Low Fringing Capacitance and Series Resistance 