Table of Contents
ISRN Spectroscopy
Volume 2012, Article ID 963298, 6 pages
Research Article

Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum

1State Key Laboratory of Optoelectronic Materials and Technology, School of Physics and Engineering, Sun Yat-Sen University, Guangzhou 510275, China
2Instrumental Analysis & Research Center, Sun Yat-Sen University, Guangzhou 510275, China

Received 3 August 2012; Accepted 1 September 2012

Academic Editors: S.-I. Kondo and S. Rossi

Copyright © 2012 Yuqi Xue et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Modification of hydrogen-free diamond-like carbon (DLC) is presented, with acrylic acid (AA) vapor carried into a vacuum chamber by argon and with the in situ assistance of low-power radio frequency (RF) plasma at a temperature below 100°C. Measured by atomic force microscopy (AFM) technique, the roughness ( ) of the DLC was  nm. XPS and FT-IR spectra analysis showed that carboxyl groups were immobilized on the surface of the DLC films, with about 40% of carboxyl group area coverage. It was found that the RF plasma and reaction time are important in enhancing the modification rate and efficiency.