Table of Contents
ISRN Materials Science
Volume 2013, Article ID 172054, 9 pages
Research Article

Development of a New Piezoelectric Actuator with Slits

1Department of Mechanical Engineering, Osaka Institute of Technology, 5-16-1 Ohmiya, Asahi-Ku, Osaka 535-8585, Japan
2Department of Technology Management, Osaka Institute of Technology, 5-16-1 Ohmiya, Asahi-Ku, Osaka 535-8585, Japan
3Department of Precision Engineering, Tokai University, 1117 Kitakaname, Kanagawa, Hiratsuka 259-1292, Japan
4Department of Mechanical System Engineering, Kumamoto University, 2-39-1 Kurokami, Chuo-Ku, Kumamoto 860-8555, Japan

Received 23 May 2013; Accepted 2 July 2013

Academic Editors: S. J. Milne and D. Ricinschi

Copyright © 2013 Yasutomo Uetsuji et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


A piezoelectric actuator was developed for fluid pumps in health monitoring systems. We devised a piezoelectric actuator with some slits, which allows the stretching and contracting deformation in in-plane direction and creates large deflection in out-of-plane direction. The static behaviors under uniform electric field have been analyzed by finite element method. And then, the optimum geometry of slits was searched by response surface methodology for unimorph and bimorph actuators to output the largest deflection under various fixed conditions. The computational results indicated that a bimorph actuator with cross-shaped slit under outside-fixed condition has superior performance for fluid pumps. The proposed slit-inserted actuators have been manufactured as an experiment. As a result, it was verified that the developed actuator can amplify the deflection compared with conventional nonslit actuators.