Table of Contents
ISRN Nanotechnology
Volume 2013 (2013), Article ID 368671, 5 pages
http://dx.doi.org/10.1155/2013/368671
Research Article

Resolution Improvement in Stage-Scanning Electron Holography: Comparison with Conventional Electron Holography

1Department of Materials Science and Engineering, Saitama Institute of Technology, 1690 Fusaiji, Fukaya, Saitama 369-0293, Japan
2Surface Physics and Structure Unit, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
3Advanced Measurement and Analysis Center, Central Research Laboratory, Hitachi Ltd., Hatoyama, Saitama 350-0395, Japan
4Department of Materials Science and Engineering, Shibaura Institute of Technology, 3-7-5 Toyosu, Koto-ku, Tokyo 135-8548, Japan
5Transmission Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan

Received 13 May 2013; Accepted 26 June 2013

Academic Editors: I.-C. Chen, C. Malagù, and B. Pignataro

Copyright © 2013 Dan Lei et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. D. Gabor, “Microscopy by reconstructed wave-fronts,” Proceedings of the Royal Society London, vol. 197, pp. 454–487, 1949. View at Google Scholar
  2. H. Lichte and M. Lehmann, “Electron holography-basics and applications,” Reports on Progress in Physics, vol. 71, no. 1, Article ID 016102, 2008. View at Publisher · View at Google Scholar
  3. A. Tonomura, Electron Holography, Springer, Berlin, Germany, 1993.
  4. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based tomography and interferometry,” Journal of the Optical Society of America, vol. 72, no. 1, pp. 156–160, 1982. View at Google Scholar · View at Scopus
  5. T. Fujita, K. Yamamoto, M. R. McCartney, and D. J. Smith, “Reconstruction technique for off-axis electron holography using coarse fringes,” Ultramicroscopy, vol. 106, no. 6, pp. 486–491, 2006. View at Publisher · View at Google Scholar · View at Scopus
  6. Q. Ru, J. Endo, T. Tanji, and A. Tonomura, “Phase-shifting electron holography by beam tilting,” Applied Physics Letters, vol. 59, no. 19, pp. 2372–2374, 1991. View at Publisher · View at Google Scholar · View at Scopus
  7. G. Lai, Q. Ru, K. Aoyama, and A. Tonomura, “Electron-wave phase-shifting interferometry in transmission electron microscopy,” Journal of Applied Physics, vol. 76, no. 1, pp. 39–45, 1994. View at Publisher · View at Google Scholar · View at Scopus
  8. W. J. De Ruijter and J. K. Weiss, “Detection limits in quantitative off-axis electron holography,” Ultramicroscopy, vol. 50, no. 3, pp. 269–283, 1993. View at Publisher · View at Google Scholar · View at Scopus
  9. K. Yamamoto, T. Hirayama, and T. Tanji, “Off-axis electron holography without Fresnel fringes,” Ultramicroscopy, vol. 101, no. 2–4, pp. 265–269, 2004. View at Publisher · View at Google Scholar · View at Scopus
  10. H. Lichte, “Performance limits of electron holography,” Ultramicroscopy, vol. 108, no. 3, pp. 256–262, 2008. View at Publisher · View at Google Scholar · View at Scopus
  11. D. Lei, K. Mitsuishi, K. Harada, M. Shimojo, D. Y. Ju, and M. Takeguchi, “Mapping of phase distribution in electron holography with a stage-scanning system,” Materials Science Forum, vol. 750, pp. 152–155, 2013. View at Google Scholar
  12. D. Lei, K. Mitsuishi, K. Harada, M. Shimojo, D. Y. Ju, and M. Takeguchi, “Direct acquisition of interferogram by stage scanning in electron interferometry,” Microscopy, 2013. View at Publisher · View at Google Scholar
  13. M. Takeguchi, M. Shimojo, M. Tanaka, R. Che, W. Zhang, and K. Furuya, “Electron holographic study of the effect of contact resistance of connected nanowires on resistivity measurement,” Surface and Interface Analysis, vol. 38, no. 12-13, pp. 1628–1631, 2006. View at Publisher · View at Google Scholar · View at Scopus
  14. M. Takeguchi, A. Hashimoto, M. Shimojo, K. Mitsuishi, and K. Furuya, “Development of a stage-scanning system for high-resolution confocal STEM,” Journal of Electron Microscopy, vol. 57, no. 4, pp. 123–127, 2008. View at Publisher · View at Google Scholar · View at Scopus
  15. M. Takeguchi, K. Mitsuishi, D. Lei, and M. Shimojo, “Development of sample-scanning electron holography,” Microscopy and Microanalysis, vol. 17, supplement 2, pp. 1230–1231, 2011. View at Google Scholar
  16. H. Lichte, D. Geiger, A. Harscher et al., “Artefacts in electron holography,” Ultramicroscopy, vol. 64, no. 1–4, pp. 67–77, 1996. View at Publisher · View at Google Scholar · View at Scopus