Optimum Barrier Height for SiC Schottky Barrier Diode

Table 3

Optimization results for the first section.

Results	𝑉	𝜙𝑚 (eV)	𝑁𝐴 (cm^−3)	𝑁𝑚 (cm^−3)	𝑁𝑓 (cm^−3)	𝐷it (cm^−3)	𝑑ox (cm)	𝜙𝐵 (V)
Maximize	0.7	4.4	4𝐸15	4𝐸12	8𝐸13	6𝐸11	9𝐸−8	3.328
Minimize	0.6	4.1	4𝐸15	8𝐸10	8𝐸12	4𝐸13	2.5𝐸−7	0.028