Table of Contents
ISRN Materials Science
Volume 2013 (2013), Article ID 637608, 17 pages
Review Article

Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy

Department of Physics, CNISM and NIS Centre of Excellence, University of Torino, Via P. Giuria 1, 10125 Torino, Italy

Received 19 September 2012; Accepted 16 October 2012

Academic Editors: Y. Ge, Y. Kusano, V. Ralchenko, and H. Yasuda

Copyright © 2013 Ettore Vittone. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Ettore Vittone, “Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy,” ISRN Materials Science, vol. 2013, Article ID 637608, 17 pages, 2013. doi:10.1155/2013/637608