Review Article

Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy

Figure 11

(a) IBIC map of a GaAs Schottky diode obtained using a 2 MeV microbeam; the reverse applied bias was 50 V. (b) The relevant pulse height spectrum. See [105] for details.
637608.fig.0011a
(a)
637608.fig.0011b
(b)