Review Article

Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy

Figure 6

IBIC maps (using 2 MeV ion microbeam) of a polycrystalline CVD diamond detector in dark conditions (b) and under blue (450 nm) light illumination (a). The image size is μm2. For details, see [66, 74].
637608.fig.006a
(a)
637608.fig.006b
(b)