Research Article
Influence of Oxygen on Zinc Oxide Films Fabricated by Ion-Beam Sputter Deposition
Table 1
The resistivities and thickness of the films deposited at various oxygen partial pressures.
| Sample | Sheet resistivity (Ω/square) | Thickness (nm) | Resistivity (mΩ·cm) |
| ZnO-2 | | 96.1 | | ZnO-4 | | 94.2 | | ZnO-8 | | 102.5 | | ZnO-10 | | 86.9 | | ZnO-12 | | 122.0 | | ZnO-15 | | 117.0 | | ZnO-20 | | 114.9 | |
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