Large-Area Crystalline Silicon Solar Cell Using Novel Antireflective Nanoabsorber Texturing Surface by Multihollow Cathode Plasma System and Spin-On Doping

Table 1

Parameters of a typical IR furnace SOD diffusion.

Heating cycle in sec.		Cooling cycle in sec.		Plateau temp. and time	N2 flow cc/min	O2 flow cc/min
50 to 684°C	684 to 800°C	800 to 500°C	500 to 100°C	800°C and 180 sec	100	50
120	60	120	180