Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering

Table 2

Variation in colour of AlN films with nitrogen/argon flow ratio.

N2/Ar flow ratio (%)	Deposition time (min.)	Colour of the film
30	60	Yellow
40	60	Pink
50	90	Blue
60	90	Blue
80	90	Violet