Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering

Table 3

Measured ellipsometric data of wurtzite AlN.

N2/Ar flow ratio (%)	Thickness (nm)	Band gap 𝐸𝑔 (eV)	𝜀∞
30	202	5.48	1.47
40	196	5.48	1.79
50	282	5.40	1.47
60	276	5.47	1.39
80	247	5.00	0.94