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International Scholarly Research Notices
Table of Contents
International Scholarly Research Notices
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2013
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Article
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Tab 3
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Research Article
Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering
Table 3
Measured ellipsometric data of wurtzite AlN.
N
2
/Ar flow ratio (%)
Thickness (nm)
Band gap
(eV)
30
202
5.48
1.47
40
196
5.48
1.79
50
282
5.40
1.47
60
276
5.47
1.39
80
247
5.00
0.94