Growth of MoO₃ Films by RF Magnetron Sputtering: Studies on the Structural, Optical, and Electrochromic Properties

Figure 2

EDAX spectra of MoO₃ films deposited on glass substrates at oxygen partial pressures: (a) 8×10⁻⁵ mbar and (b) 4×10⁻⁴ mbar.

(a)

(b)