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International Scholarly Research Notices
Table of Contents
International Scholarly Research Notices
/
2013
/
Article
/
Tab 2
/
Research Article
Growth of
Films by RF Magnetron Sputtering: Studies on the Structural, Optical, and Electrochromic Properties
Table 2
Chemical composition analysis of MoO
3
films analyzed by EDAX.
Oxygen partial pressure (mbar)
O
(at %)
Mo
(at %)
O/Mo
72.4
27.6
2.62
73.2
26.8
2.73
74.8
25.2
2.97
75.2
24.8
3.03