810394.fig.002
Figure 2: Scanning electron microscopic images of successive changes in the morphology of nc-SiC film after laser processing with different energy pulse density, J/cm2: 1: 4.3 × 10−4, 2: 2.1 × 10−3, 3: 4.3 × 10−2, 4: 4.3 × 10−2, 5: 6.5 × 10−2, 6: 8.4 × 10−2, 7: 10.8 × 10−2, 8: 12.4 × 10−2, 9: 15.1 × 10−2, 10: 17.2 × 10−2, 11: 19.4 × 10−2, 12: 21.5 × 10−2, 13: 23.7 × 10−2, 14: 25.8 × 10−2, 15: 27.9 × 10−2, and 16: 30.1 × 10−2.