326368.fig.003a
(a)
326368.fig.003b
(b)
326368.fig.003c
(c)
Figure 3: Room temperature CL spectra of (a) O+, (b) S+, (c) Se+ implanted SiO2 layers with thicknesses  nm and implantation doses  cm−2. After ion implantation, the samples were thermally post-annealed at °C.