Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity

Table 1

The best fit results of soft X-ray resonant reflectivity measurements on Mo/Si ML with MoSi₂ composition at interfaces obtained tuning photon energy at Si L-edge. In square bracket the tabulated values of 𝛿 and 𝛽 from Henke et al. [61].

Energy (eV)	𝛿Si	𝛽Si	𝛿Mo	𝛽Mo	𝛿MoSi2	𝛽MoSi2	𝑅(%)
100.8	−0.012 [−0.014]	0.015 [0.0167]	0.058 [0.0589]	0.004 [0.005]	0.007 [0.0089]	0.017 [0.0184]	8.6
100	−0.015 [−0.0163]	0.007 [0.0066]	0.060 [0.0603]	0.005 [0.005]	0.008 [0.0071]	0.0092 [0.0085]	9.3