Properties of TiC Coating by Pulsed DC PACVD

Table 3

Different parameters in coating process (with duty cycle = 33%, voltage = 600 V, total pressure = 6 mbar, flux argon = 0.5 NL/min, and flux hydrogen = 1.6 NL/min).

Sample number	Time (min)	Titanium chloride (sccm)	Methane (NL/min)	Temp. (°C)	CH4/TiCl4
1	80	50	80	490	1.6
2	80	50	100	470	2
3	80	50	120–300	450	2.4–6
4	80	50	100	450	2
5	80	50	120–300	470	2.4–6