Journal of Coatings / 2013 / Article / Tab 3

Research Article

Properties of TiC Coating by Pulsed DC PACVD

Table 3

Different parameters in coating process (with duty cycle = 33%, voltage = 600 V, total pressure = 6 mbar, flux argon = 0.5 NL/min, and flux hydrogen = 1.6 NL/min).

Sample numberTime (min)Titanium chloride (sccm)Methane (NL/min)Temp. (°C)CH4/TiCl4

18050804901.6
280501004702
38050120–3004502.4–6
480501004502
58050120–3004702.4–6

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