Table of Contents
Journal of Coatings
Volume 2014, Article ID 902031, 6 pages
Research Article

Structure and Friction Behavior of Cr /a-C:H Nanocomposite Films

1School of Mechatronic Engineering, Lanzhou Jiaotong University, Lanzhou 730070, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received 26 October 2013; Accepted 14 January 2014; Published 23 February 2014

Academic Editor: Wenya Li

Copyright © 2014 Lunlin Shang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


CrN and Cr /a-C:H nanocomposite films were deposited on Si substrates by the magnetron sputtering technique. The structure, chemical state, and friction behavior of the Cr /a-C:H films prepared at various CH4 content were studied systematically. The CrN film shows strong (111) and (220) orientation, while the Cr /a-C:H films consist of the nanocrystalline Cr or Cr particles embedded in an amorphous hydrocarbon (a-C:H) matrix and show weak diffraction peaks, which is in accordance with the XPS analysis results. The typical Raman D and G peaks are observed, indicating that the separated amorphous carbon or C phase appears in the Cr /a-C:H films. However, no chromium carbide was observed in all the as-deposited samples. From the SEM graphs, all the deposited films depicted a dense and compact microstructure with well-attached interface with the substrate. The average friction coefficient of the Cr /a-C:H films largely decreased with increasing CH4 content.