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Journal of Coatings
Table of Contents
Journal of Coatings
/
2014
/
Article
/
Tab 1
/
Research Article
Structure and Friction Behavior of Cr
/a-C:H Nanocomposite Films
Table 1
The deposition parameter and compositions of the as-deposited films.
Sample no.
Deposition conditions
N
2
(sccm)
CH
4
(sccm)
Ar (sccm)
CH
4
content
C1
160
0
40
0
C2
140
20
40
10%
C3
120
40
40
20%
C4
100
60
40
30%
C5
80
80
40
40%
C6
60
100
40
50%