Journal of Coatings / 2014 / Article / Tab 1

Research Article

Structure and Friction Behavior of Cr /a-C:H Nanocomposite Films

Table 1

The deposition parameter and compositions of the as-deposited films.

Sample no.Deposition conditions
N2 (sccm)CH4 (sccm)Ar (sccm)CH4 content

C11600400
C2140204010%
C3120404020%
C4100604030%
C580804040%
C6601004050%