Surface Modification of Light Alloys by Low-Energy High-Current Pulsed Electron Beam

Figure 1

Schematic diagram of the LEHCPEB source based on vacuum spark plasma. 1: cathode, 2: anode, 3: collector, 4: vacuum chamber, 5: cathode plasma, 6: anode plasma, 7: solenoid, 8: spark plasma sources, 9: specimen, 10: plasma sheath, 11: electron beam [4].