Research Article

A Model of Numerical Calculation of Conductivity for III-V MBE Epilayers Using a Hall Device

Table 3

Growth conditions of InAs layers on (001) GaAs substrates.

No. of proceduresThickness [μm]Relation between V/IIISubstrate temperature [°C]

9245440
2985.64.5450
3014.73.7500
3309.055.8506