Stoichiometry Control of ZnO Thin Film by Adjusting Working Gas Ratio during Radio Frequency Magnetron Sputtering

Figure 1

(Color online) Typical optical emission spectra obtained from in-situ measurement during ZnO deposition: (a) Ar: 30 sccm and, (b) Ar/O₂ = 10/30 (sccm/sccm) at deposition pressure of 7 Pa.