Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials

Figure 5

Calculated (dots) and measured (line) reflectivity from a GaAs layer with a thickness of 48 nm on a Si substrate. The surface roughness 𝜎₁ is 2.8 nm and the interfacial roughness 𝜎₂ is 0.7 nm.