Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials

Figure 9

X-ray reflectivity from a silicon wafer covered with a thin (10 nm) tungsten film calculated by the theory in use prior to this work. Solid line shows the case of a flat surface. Dashed line shows the case of a surface with an rms surface roughness of 0.3 nm.