Research Article
Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film
| | Ar : N2 partial pressure ratio | Δ (gm) | Area, (cm2) | Density, (gcm−3) | Thickness, (μm) | Thickness measured using SEM (μm) |
| | 7 : 1 | 8.81 × 10−4 | 72.25 × 10−2 | 5.22 | 2.3 | | | 3 : 1 | 11.31 × 10−4 | 72.25 × 10−2 | 5.22 | 3 | 2.947 | | 5 : 3 | 14.55 × 10−4 | 72.25 × 10−2 | 5.22 | 3.9 | | | 1 : 1 | 18.86 × 10−4 | 72.25 × 10−2 | 5.22 | 5 | 4.860 | | 3 : 5 | 6.34 × 10−4 | 72.25 × 10−2 | 5.22 | 1.7 | | | 1 : 3 | 1.89 × 10−4 | 72.25 × 10−2 | 5.22 | 0.5 | 0.507 | | 1 : 7 | 1.16 × 10−4 | 72.25 × 10−2 | 5.22 | 0.3 | |
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