Synthesis of ReN₃ Thin Films by Magnetron Sputtering

Figure 1

XRD patterns for DC-sputtered thin films: (a) 𝐹_N=0; (b) 𝐹_N=16; (c) 𝐹_N=20; (d) 𝐹_N=30 mL min⁻¹.

(a)

(b)

(c)

(d)