Journals
Publish with us
Publishing partnerships
About us
Blog
Journal of Materials
Table of Contents
Journal of Materials
/
2014
/
Article
/
Fig 15
/
Research Article
Synthesis and Characterization of LPCVD Polysilicon and Silicon Nitride Thin Films for MEMS Applications
Figure 15
Influence of thickness on residual stress in LPCVD silicon nitride.