Research Article

Influence of Gas Sort on the Nucleation Region Width of Si Nanocrystal Grains Prepared by Pulsed Laser Ablation

Table 2

Results of experimental measurement and theoretical calculation in different gases.

Gas sortAtomic mass /(u)Position of grains on substrates /(mm)Max mean size /(nm)Nucleation location of calculation /(mm)

He410~618.43.6~59.8
Ne204~366.52.4~34.9
Ar405~456.92.7~43.2