Width of Nucleation Region of Si Nanocrystal Grains Prepared by Pulsed Laser Ablation with Different Laser Fluence

Table 1

Deposition location of grains on substrates and nucleation location in the space with different laser fluence.

Sample	A	B	C	D	E	F
Laser fluence [J/cm^2]	2	2.5	3	3.5	4.5	6
[mm]	7.7–31.4	7.2–34.8	6.4–37.4	5.3–42.8	4.3–45.0	3.9–58.4
[mm]	3.5–28.9	3.3–32.7	3.0–34.5	2.5–41.6	2.2–43.8	1.8–56.7
NR width	25.4	29.4	31.5	39.1	41.6	54.9