Table of Contents
Journal of Nanoparticles
Volume 2015, Article ID 410468, 8 pages
http://dx.doi.org/10.1155/2015/410468
Research Article

Generation Control of ZnO Nanoparticles Using a Coaxial Gas-Flow Pulse Plasma Ar/O2 Plasma

Department of Electrical Engineering, Tohoku University, Aramaki Aza-Aoba 6-6-05, Aoba-ku, Sendai 980-8579, Japan

Received 1 July 2015; Accepted 25 August 2015

Academic Editor: Raphael Schneider

Copyright © 2015 Hiroki Shirahata and Satoru Iizuka. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Generation of ZnO nanoparticles was investigated using a coaxial gas-flow pulse plasma. We studied how zinc atoms, sputtered from a zinc target, reacted with oxygen in a plasma and/or on a substrate to form ZnO nanoparticles when the discharge parameters, such as applied pulse voltage and gas flow rate, were controlled in an O2/Ar plasma. The formation processes were estimated by SEM, TEM, and EDX. We observed many ZnO nanoparticles deposited on Si substrate. The particle yield and size were found to be controlled by changing the experimental parameters. The diameter of the particles was typically 50–200 nm.