Table of Contents
Journal of Nanoscience
Volume 2013 (2013), Article ID 401710, 11 pages
http://dx.doi.org/10.1155/2013/401710
Research Article

Structural, Nanomechanical, and Field Emission Properties of Amorphous Carbon Films Having Embedded Nanocrystallites Deposited by Filtered Anodic Jet Carbon Arc Technique

Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting Division, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Road, New Delhi 110012, India

Received 23 April 2013; Revised 18 July 2013; Accepted 22 July 2013

Academic Editor: Andreas Zeinert

Copyright © 2013 R. K. Tripathi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This paper reports the effect of substrate bias on the structural, nanomechanical, and field emission properties of amorphous carbon films having embedded nanocrystallites (a-C:nc films) deposited by filtered anodic jet carbon arc technique. X-ray diffraction results exhibit predominantly an amorphous nature of the films. High-resolution transmission electron microscope images showed the amorphous nature of the films with nanocrystallites embedded in the amorphous matrix. Ultrafine nanograined microstructures with average grain size between 20 and 30 nm are observed throughout the film with a majority of the grains of single crystallites. A strong influence of substrate bias has been observed on the structural, nanomechanical, and field emission properties. Maximum nanohardness (H) of 58.3 GPa, elastic modulus (E) of 426.2 GPa, and H/E of 0.136 have been observed in a-C:nc films deposited at −60 V substrate bias which showed 82.6% sp3 content.