A Novel Method for Investigating the Casimir Effect on Pull-In Instability of Electrostatically Actuated Fully Clamped Rectangular Nano/Microplates

Table 1

Specifications of the system for FE simulation.

Specification	Value
Width (m)	250
Length (m)	250
Thickness (m)	3
Young’s modulus (GPa)	169
Poisson’s ratio	0.28
Density (Kg/)	2331
Initial gap (m)	1
Dielectric of air (F/m)