Table of Contents
Journal of Nanoscience
Volume 2016, Article ID 6571297, 12 pages
http://dx.doi.org/10.1155/2016/6571297
Review Article

Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds

1Department of Materials Science and Engineering, University of Washington, Seattle, WA 98195, USA
2Department of Chemical Engineering Education, Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 305-764, Republic of Korea
3Graduate School of Energy Science and Technology, Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 305-764, Republic of Korea

Received 30 March 2016; Accepted 24 May 2016

Academic Editor: Tian Xia

Copyright © 2016 B. Kwon and Jong H. Kim. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

B. Kwon and Jong H. Kim, “Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds,” Journal of Nanoscience, vol. 2016, Article ID 6571297, 12 pages, 2016. https://doi.org/10.1155/2016/6571297.