Table of Contents
Journal of Quality and Reliability Engineering
Volume 2014, Article ID 987847, 16 pages
http://dx.doi.org/10.1155/2014/987847
Review Article

Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

1Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia
2Department of Physics, Kohat University of Science and Technology (KUST), Kohat 26000, Pakistan

Received 30 August 2013; Revised 1 December 2013; Accepted 1 December 2013; Published 12 January 2014

Academic Editor: Adiel Teixeira de Almeida

Copyright © 2014 Mohammad Tariq Jan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Mohammad Tariq Jan, Nor Hisham Bin Hamid, Mohd Haris Md Khir, Khalid Ashraf, and Mohammad Shoaib, “Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments,” Journal of Quality and Reliability Engineering, vol. 2014, Article ID 987847, 16 pages, 2014. https://doi.org/10.1155/2014/987847.