Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

Table 4

The sensitivity of various MEMS devices [82, 83].

Fields of application	Sensitivity in value “g”	Power consumption	Frequency range
Medical	±16	≥19 mA	2.4 MHz IEEE
Implantable	±2, ±4, ±8, ±16	25 uA	2.4 MH IEEE
Automobile	±35, ±50, ±70	≥1.3 mA	2.50 GHz
Defense	Up ±70	2.0 A, 20 V	650 KHz to 1.5 MHz
Communication	±20 to ±70	Fluctuates with applications	2.7 to 10 GHz
Seismology	≥±2	Fluctuates with applications	≥1 KHz