Oxide Thin Film Heterostructures on Large Area, with Flexible Doping, Low Dislocation Density, and Abrupt Interfaces: Grown by Pulsed Laser Deposition

Figure 34

(a) RHEED oscillations during the growth of an STO thin film at 𝑇_sub≈700°C, p(O₂) = 0.002 mbar, and 𝐹≈1.9 J/cm². The oscillations are visible over the whole measurement time even for a laser repetition frequency of 3 Hz. The time positions 1, 2, 3 correspond to the recording of the RHEED images marked 1, 2, 3 (right). In RHEED image no. 1, the specular (0,0) spot is framed which is used for recording the oscillations throughout this section. (b) A detailed look on three RHEED oscillations during growth with 1 Hz. A substructure related to the single laser pulses (marked by red triangles) is resolved. One STO monolayer is grown with 12 pulses.