Oxide Thin Film Heterostructures on Large Area, with Flexible Doping, Low Dislocation Density, and Abrupt Interfaces: Grown by Pulsed Laser Deposition
Table 9
Full width at half maximum (FWHM) of HR-XRD ZnO(002) rocking curves of PLD ZnO and ZnMgO thin films on the indicated substrates (best values). ω-scans were taken with Cu Kα1 radiation and with open detector at the 2Θ position of ZnO(002). For details see [54, 104].
Film on substrate (sample no.)
FWHM of HR-XRD rocking curve of ZnO(002) film peak